Product Tag(s):

Laser workstation for Through Glass Vias (TGV) micromachining

  • Manufactured by: WOP - Workshop Of Photonics

Quick Overview

FemtoTGV is a laser micromachining workstation optimized for Through Glass Vias (TGV) fabrication.

 

The most used method for glass core substrate processing while creating TGVs is laser fabrication, combined with a wet etch process. Our FemtoTGV is dedicated for laser fabrication part.

 

WOP has..

Contact us

Description

FemtoTGV is a laser micromachining workstation optimized for Through Glass Vias (TGV) fabrication.

 

The most used method for glass core substrate processing while creating TGVs is laser fabrication, combined with a wet etch process. Our FemtoTGV is dedicated for laser fabrication part.

 

WOP has been dedicated to mastering the laser micromachining of glass substrates for over a decade and has developed process technologies and equipment that are suitable for high aspect ratio through glass vias across a variety of glass types, diverse via configurations (including hourglass, straight, and tapered vias), and different etching capabilities by utilizing various chemistries.

 

WOP TGVs parameters:

 

- Roundness: >95%
- Waist: Borosilicate >90%, Alkali-free >75% (with deviation of ±3%)
- Diameter tolerance: ±3%
- Accuracy: ±1 μm, (<5 μm per 515×510 mm panel)
- Roughness: Rz <1 μm
- Yield: 100%
- Taper: taperless, hourglass

 

FemtoTGV technical specifications

Parameter Value
Glass compatibility BF33, D263t, EXG, SG 7.8 , SG 3.4, EN-1A, OA-11
Laser High power ultrashort pulse IR
Optical beam delivery WOP patented optical beam delivery engine
Samples size Laboratory: up to 300×300 mm
Industrial: up to 600×600 mm
Positioning system XYZ mechanical axes, positioning accuracy ±0.5 μm featuring continuous wafer level patterning
Vision Real-time visualization and positioning camera with feature recognition
Metrology Compactable with AOI
Sample handling Manual | semi automatic | automatic
Optical pulse detection function Miss fire detection or Low energy detection
Fume extraction system Included
Accessories Power control, polarization state control
Software Entire system control via single GUI developed by WOP
Supported file formats – 2D/3D model import: STL, DXF, DWG, AMF, PLT, FAB
– Bitmap support: BMP, GIF, JPG, JPEG, PNG
– Text files as a table array: TXT, RTF, TEX
Construction Granite base with passive / active vibration control

 

Ask a question about the Laser workstation for Through Glass Vias (TGV) micromachining