RGA100, RGA200 and RGA300 Residual Gas Analyzer

Manufactured by: SRS Stanford Research Systems

Quick Overview

100, 200 and 300 amu systems
Better than 1 amu resolution
6 orders of magnitude dynamic range in a single scan
5 x 10^-14 Torr detection limit
RGA Windows and LabVIEW software
Field-remplaceable electron multiplier and filament

&..

Description

Description

The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA's provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows Software package that is used for data acquisition and analysis, as well as probe control.

Rugged Probe Design

The probe consists of an ionizer, quadrupole mass filter and a detector. The simple design has a small number of parts which minimizes outgassing and reduces the chances of introducing impurities into your vacuum system. The probe assembly is rugged and mounts onto a standard 2 ¾ inch CF flange. It is covered with a stainless steel tube with the exception of the ionizer which requires just 2 ½ inches of clearance in your vacuum system”about that of a standard ion gauge. The probe is designed using self-aligning parts so it can easily be reassembled after cleaning.

Compact Electronics Control Unit

The densely packed ECU contains all the necessary electronics for controlling the RGA head. It is powered by either an external +24 VDC (2.5 A) power supply or an optional, built-in power module which plugs into an AC outlet. LED indicators provide instant feedback on the status of the electron multiplier, filament, electronics system and the probe. The ECU can easily be removed from the probe for high temperature bakeouts.

Unique Filament Design

A long-life, dual thoriated-iridium (ThO₂/Ir) filament is used for electron emission. Dual ThO₂/Ir filaments last much longer than single filaments, maximizing the time between filament replacement. Unlike other designs, SRS filaments can be replaced by the user in a matter of minutes.

Continuous Dynode Electron Multiplier

A Faraday cup detector is standard with SRS RGA systems which allows partial pressure measurements from 10^-5 to 5 ‚´ 10^-11 Torr. For increased sensitivity and faster scan rates, an optional electron multiplier is offered that detects partial pressures down to 5 ,' 10^-14 Torr. This state-of-the-art macro multi-channel continuous-dynode electron multiplier (CDEM) offers increased longevity and stability and can also be replaced by the user a first for RGAs!

RGA - PDF 1.8 Meg