Xeryon offers a range of precision linear stages in different lengths and with many additional options.
With travel ranges up to 120 mm, the number of possible applications is endless. Thanks to the patented Crossfixx™ ultrasonic piezo technology, travel velocities of 200 mm/s can be reached, making Xeryon precision linear stages the fastest precision stages on the market. Xeryon linear stages are perfectly fit for scanning setups, providing constant scanning speed with a speed stability of less than 2%.
Xeryon offers different levels of precision, from our Original series with a resolution of 1.25 µm, up to our Ultimate series with a resolution of 1 nm. For each model, additional options are available – for example, high vacuum compatibility, making the stage the perfect solution for your SEM or your vacuum chamber. With the optional extra small cage, we can get even more travel distance from our stages, driving the volume-to-stroke ratio to the limit.
Drive principle: patented Crossfixx™ ultrasonic piezo technology
Bearings: precision crossed-roller
Lifetime distance: > 100 km
Xeryon linear stages datasheet - PDF 1.8 Meg